Abstract
ZnO thin films phosphor was fabricated using reducing annealing of deposited thin films. The effect of oxygen ratios on the structural and optical properties of ZnO films as well as nanostructures were investigated. The crystallinity of ZnO nanostructures was significantly improved depending on the oxygen ratios increasing during the radio frequency magnetron sputtering process. The photoluminescence property was enhanced with increasing the density of ZnO nanostructures which obtained from high oxygen ratio deposited thin film.
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