P‐140: High Bandwidth Glass‐Based Capacitive Micromachined Ultrasound Transducers (G‐CMUTs) for Medical Imaging Application

Abstract

In this work, we have developed the glass‐based capacitive micromachined ultrasound transducers (G‐CMUTs). The sacrificial layer etching process flow employed for the manufacturing of the G‐CMUTs is reported. Specific G‐CMUTs has significant promise acoustic property with ~130 % bandwidth at ~8.2 MHz. Real time in‐vivo ultrasound imaging capability demonstrates the actual usability of G‐CMUTs technology for medical imaging.