Abstract
Energy conversion devices draw much attention due to their effective usage of energy and resulting decrease in CO2 emissions, which slows down the global warming processes. Fabrication of energy conversion devices based on ferroelectric and piezoelectric lead-free films is complicated due to the difficulties associated with insufficient elaboration of growth methods. Most ferroelectric and piezoelectric materials (LiNbO3, BaTiO3, etc.) are multi-component oxides, which significantly complicates their integration with micro- and nanoelectronic technology. This paper reports the effect of the oxygen pressure on the properties of nanocrystalline lithium niobate (LiNbO3) films grown by pulsed laser deposition on SiO2/Si structures. We theoretically investigated the mechanisms of LiNbO3 dissociation at various oxygen pressures. The results of x-ray photoelectron spectroscopy study have shown that conditions for the formation of LiNbO3 films are created only at an oxygen pressure of 1 × 10−2 Torr. At low residual pressure (1 × 10−5 Torr), a lack of oxygen in the formed films leads to the formation of niobium oxide (Nb2O5) clusters. The presented theoretical and experimental results provide an enhanced understanding of the nanocrystalline LiNbO3 films growth with target parameters using pulsed laser deposition for the implementation of piezoelectric and photoelectric energy converters.
Highlights
Over the past few decades, the range of wireless wearable sensors and portable electronic devices has expanded significantly, and in most cases, their power supply is provided by electrochemical batteries [1,2,3]
The ∆G value of the remaining reactions is positive in the entire temperature range at an oxygen pressure of 1 × 10−2 Torr, the forward direction of the reaction is impossible in the temperature range from 773 K to 8773 K
Studies of the properties of LiNbO3 films grown by the pulsed laser deposition (PLD) show that increasing oxygen pressure in the growth chamber has a significant effect on target dissociation mechanism, structure, composition, and properties of the deposited films
Summary
Over the past few decades, the range of wireless wearable sensors and portable electronic devices has expanded significantly, and in most cases, their power supply is provided by electrochemical batteries [1,2,3]. There are many sources of energy: mechanical, thermal, chemical, and solar, that can be converted into electrical energy [5]. Piezoelectric materials are widely used in the design and manufacture of energy converters that enable an effective conversion of mechanical energy of deformations (vibrations) into an electric current [6,7,8]. The possibility of creating miniature piezoelectric energy converters opens up wide opportunities for their integration with “smart clothes” and wearable electronic devices, leading to the demand for using lead-free materials [9]. Composites and ferroelectric films are promising materials for the fabrication of piezoelectric energy converters
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