Abstract
Oxygen depth distributions have been determined, in silicon on insulator (SOI) structures formed by implantation of 200 keV oxygen ions into (100) silicon wafers. The implanted layers have been studied by RBS, SIMS and cross-sectional TEM and a computer model has been developed which enables the evolution of the oxygen distribution to be followed. Processing conditions, to form SOI substrates for fabrication of VLSI devices in the top silicon layer, are implantation energy 200 keV, dose 1.8 × 10 18 O cm −2 and implantation temperature 500°C. An anneal at 1150°C for 2 h is required to form a thin single crystal layer, which is depleted of oxygen. The dielectric properties of the stoichiometric SiO 2 are improved by this thermal processing.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.