Abstract
Systematic investigation of dry oxidation of sub-100 nm diameter Si nanopillars (NPs) of various diameters under varying conditions reveals that at 900 °C, the oxidation involves a deep self-limiti...
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
