Overview of Ion Spectroscopies for Surface Compositional Analysis

Abstract

The purposes of this chapter are (1) to provide a brief overview of the role of surface compositional analysis (i.e., surface analysis) in surface characterization, (2) to provide a brief overview of the methods of surface analysis involving ion bombardment of a solid or ion detection, and (3) to discuss briefly each of the methods of surface analysis using the ion spectroscopies that are not treated by the other chapters in this volume.Comparisons and contrasts of the most widely used methods of surface analysis are discussed in Chapter 7 of this volume. Extensive literature citations are provided, so that further details about surface analysis methods can be obtained. Both the surface (i.e., the outer monolayer of atoms on a solid)and the interface (i.e., the boundary between two compositionally different solids) are included in the term “surface” as it is used in this chapter.