Abstract
Abstract We have fabricated NbN Josephson junctions with NbNx barriers formed by plasma nitridation on the surface of the base superconductive NbN layer. Both nonhysteretic junctions (overdamped junctions) and small-hysteretic ones have been obtained at 4.2 K by changing plasma nitridation conditions. An overdamped junction showed a product of the critical current Ic and junction resistance Rn (an IcRn product) of 0.95 mV at 4.2 K and the Ic exponentially decreased with increasing temperature. On the other hand, a small-hysteretic junction showed Superconductor-Insulator-Superconductor (SIS)-like characteristics in the temperature dependence of Ic and its current–voltage characteristics changed to nonhysteretic ones at the temperature more than 8 K. The IcRn product for the junction was 0.91 mV at 8.2 K.
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