Abstract
Outgassing characteristics of an electropolished stainless steel (304) pipe wall were investigated by an isolation method. The free outgassing rate after an in situ bakeout (150 °C, 20 h) was estimated as low as 1.6×10−12 Pa ℓ s−1cm−2. After the in situ bakeout, H2 molecules were steadily evolved from the pipe wall, whereas most of CO, C, CH4, and CO2 molecules were emitted from the operating mass spectrometer and Bayard–Alpert gauge with incandescent filaments. Auger depth profile analysis revealed that the oxide layer of an electropolished surface was cleaner, thinner, and finer in microstructure than that of a buff-polished surface. This is the reason why an electropolished surface showed a very low outgassing rate.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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