Abstract
Metal thin films don't necessarily appear general fatigue behavior like a bulk material. By a balk and film material, there is difference of restricted state because of differing in the number of grains to the direction of film thickness. In previous report the diagram of ratio of slipped grains and number of cycle was sorted by film thickness/grain size ratio in carbon steel thin film. Then slip ratio dramatically changed film thickness/grain size ratio 0.81 to 1.00. The influence of grain's existence frequency to direction of film thickness was considered to slip band formation. In this research cross section of carbon steel thin film was observed. As a result, slip deformation occurred over two grains to film thickness. Slip band were faced out of plane when slip system was specified by EBSD.
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