Abstract

Polarization aberration (PA) is a serious issue that affects imaging quality for optical systems with high numerical aperture. Numerous studies have focused on the distribution rule of PA on the pupil, but the field remains poorly studied. We previously developed an orthonormal set of polynomials to reveal the pupil and field dependences of PA in rotationally symmetric optical systems. However, factors, such as intrinsic birefringence of cubic crystalline material in deep ultraviolet optics and tolerance, break the rotational symmetry of PA. In this paper, we extend the polynomials from rotationally symmetric to M-fold to describe the PA of M-fold optical systems. Two examples are presented to verify the polynomials.

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