Abstract

The results of investigations of some possibilities of numeric-analytical methods application for solving problems of the heat-mass transfer that is concerned with wide kilovolt electron beam with solids interaction processes are reported. The differential equation describing the diffusion of non-equilibrium minority charge carriers generated by electron beam in semiconducotrs is observed. The spectral method using the modified Laguerre's functions based on the mathematical orthogonal projection apparatus is developed for solving this equation.

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