Abstract
BLT ((Bi,La) 4 Ti 3 O 12 ) thin films with (117)- and (00l)-preferred orientation were fabricated on Pt/Ti/SiO 2 /Si(100) substrates by a sol-gel method. Films were annealed in O 2 ambient at 750°C for 30 min to crystallize material. In this crystallization process, the temperature heating rate was changed from 0.5°C/sec to 300°C/sec. It was shown from XRD and XRD reciprocal space mappings analyses that the BLT films with (117)-preferred orientation were formed at lower temperature rate, while the films with c-axis preferred orientation were formed at higher heating rate. The remanent polarization (2 P r ) values of the BLT films with (117)- and (00l)-preferred orientation were 36 and 10 μ C/cm 2 , respectively. SEM showed that the (117)-oriented BLT films are composed of peg-like small grains. On the other hand, large platelet-like grains were found in (00l)-oriented BLT films.
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