Orientation and Phase Mapping in TEM Microscopy (EBSD-TEM Like): Applications to Materials Science

Abstract

EBSD is a well known technique that allows orientation and phase mapping using an SEM. Although the technique is very powerful, has serious limitations related with a) special resolution limited to 50 nm (SEM-FEG) and b) specimen preparation issues as is not possible to obtain EBSD signal from rough surfaces or strained materials , nanoparticles etc.. To address those difficulties , a novel technique has been developed recently (EBSD-TEM like) allowing automatic orientation and phase mapping using template matching analysis of acquired diffraction patterns in TEM. Electron beam is scanned through the sample area of interest ; the acquired electron diffraction patterns from several sample locations are compared via cross-correlation matching techniques with pre-calculted simulated templates to reveal local crystal orientation and phases. The dedicated device (ASTAR) allows orientation and phase identification of crystallographic orientation in a region of interest up to 10µm2, with a step size ranging from 1nm to 20nm depending on the transmission electron microscope setting (FEG or LaB6).