Abstract
A metal-organic approach has been employed for the preparation of anisotropic CuO nanoparticles. These nanostructures have been characterized by transmission and high resolution transmission electron microscopy, field-emission scanning electron microscopy, X-ray powder diffraction, Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. The CuO nanoparticles have been deposited as gas-sensitive layers on miniaturized silicon devices. At an operating temperature of 210 °C, the sensors present an optimum response toward carbon monoxide correlated with a fast response (Rn) and short recovery time. A high sensitivity to CO (Rn≈150 %, 100 ppm CO, RH 50 %) is achieved. These CuO nanoparticles serve as a very promising sensing layer for the fabrication of selective CO gas sensors working at a low temperature.
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