Abstract
Pure SiO2 and Al2O3 films and organically modified SiO2 layers are deposited by three different CVD techniques on SnO2 thin-film gas detectors. Ion-beam-assisted deposition (IBAD) of TEOS and ph-TEOS under bombardment with argon or oxygen ions is found to be suitable for the preparation of organically modified SiO2 membranes at room temperature. The intended selective function of the membranes for gas detection is proved. A size selective mechanism is found to be dominant, primarily controlled by the thickness of the films independent of the type of the membrane. The thickness is the most important parameter to design a membrane of specific selectivity. Smaller effects are induced by the chemistry of the membranes which nevertheless may be suitable to distinguish between molecules of comparable size. Although the organic modifications are not stable at the operation temperature of the sensors, the initial incorporation seems to be capable to tailor ceramic membranes with different properties.
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