Abstract
The role of sp3and sp2 bonding and hydrogen content on the optical, electronic and elastic properties of diamond-like carbon (DLC) thin films is investigated. The films were prepared using a graphite target and CH4/Ar ambient by RF and DC reactive magnetron sputtering at 4.41W/cm2. Raman spectroscopy and transmission infrared spectroscopy were used to estimate the sp3/sp2 ratio and hydrogen content. The density, thickness and the surface roughness dependence on the sp3/sp2 fraction was studied by X-ray reflectivity (XRR). Surface Brillouin scattering on diamond-like carbon thin films / (001)Si establish the correlation between elastic constants and the sp3/sp2 bond ratio.
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