Abstract
In this article, optimum path planning of elliptic and cubic nanoparticles by one and dual probe atomic force microscopes is investigated. Four different parameters are considered in the cost function, including area under critical time–force diagram, critical indentation depth, path smoothness and area under force–time diagram of primary impact of nanoparticles. Also three different obstacles are added to process to make it more real. The layout of obstacles are various in each geometry. Since surfaces are rough, the effects of roughness (surface and particle) are considered in process. Genetic algorithm method has been used for path planning.
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