Abstract
This paper presents the design of a fuzzy-controller-based ultra-high vacuum pressure control system and its performance evaluation for a sputter-ion vacuum pump used in the electron storage ring at the Synchrotron Light Research Institute (Public Organization) in Thailand. The production of synchrotron light requires advanced vacuum technology to maintain stability and prevent interference of electrons in an ultra-high vacuum pressure environment of about 10−9 Torr. The presence of heat and gas rupture from the pipe wall can affect the quality of the light in that area. The institute currently uses a sputter-ion vacuum pump which is costly and requires significant effort to quickly reduce pressure increases in the area. Maintaining stable vacuum pressure throughout electron motion is essential in order to ensure the quality of the light. This research demonstrates a procedure for evaluating the performance of a sputter-ion vacuum pump using a mathematical model generated by a neural network and Molflow+ software. The model is used to estimate the pumping speed of the vacuum pump and to design a fuzzy control system for the ultra-high vacuum system. The study also includes a leakage rate check for the vacuum system.
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