Abstract
The response of quantum-conductance-based hydrogen sensors fabricated by controllable deposition of closely spaced Pd nanoparticle films between interdigital electrodes was investigated. Three typical response regions with different conductanceâhydrogen pressure correlations were observed. The response characteristics of the devices were found to depend strongly on the nanoparticle coverage. In the low H2 pressure region, higher coverage gives higher sensitivity. In the high H2 pressure region, quantitative sensing can only be realized with low nanoparticle coverage. Optimizing the coverage allows the attainment of highly sensitive hydrogen sensors with a very wide quantitative working range, extending far beyond the hydrogen pressure region associated with the α-to-ÎČ phase transition of Pd.
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