Abstract
An acoustic wave which propagates along the surface of a solid material is considered as the Surface acoustic wave (SAW). The surface acoustic gas sensor comprises of a piezoelectric substrate with a sensing layer and an interdigitated transducer etched into it. Saw devices have low power consumption, compact structure and are cost efficient and it can be used in harsh environmental conditions, even without the use of batteries. This paper proposes a material study and structural design and analysis of SAW gas sensor. The existing design consists of two rectangles provides low output potential. In order to maximize its output here introduced a new design using COMSOL Multiphysics software. The newly proposed structure consists of a rectangle and an ellipse. The simulation of existing and the proposed gas sensor structures were done. Then the surface displacement and electric potential with eigen frequencies were studied and compared for the gas sensor structures.
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