Abstract
To improve the temperature stability, response speed and sensitivity of surface acoustic wave (SAW) gas sensor, the relationship between the sensing region of the resonator for SAW gas sensor and the sensitivity of sensor is studied, a specific resonator with big space topology structure is proposed. A SAW resonator with high temperature stability is investigated from the viewpoint of piezoelectric material, cut type and fabrication process. A nano-wire bundle based SAW gas sensor with big specific-surface-area is proposed.
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