Abstract

Simulation and measurement results are presented for a two-element boundary layer flow sensor fabricated using integrated circuit and micromachining technologies. The sensor is located on a thermally isolated membrane and utilizes platinum-based resistive heating and sensing elements. Device optimization is based on quasi three-dimensional (3-D) numerical solutions of the electrothermal equations governing heat transport. Here, we investigate the effects of geometrical non-idealities, and in particular, thermal isolation (between elements and between elements and substrate) on output response and offset. The results corroborate well with measurement data for a large range of operating voltages and flow velocities.

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