Abstract
The microstructure of the compact TiO2 (c-TiO2) layer formed by atomic layer deposition (ALD) was investigated for optimization of organometal halide perovskite solar cells (PSCs). The ALD c-TiO2 layer has an amorphous structure alleviating performance deterioration of the PSCs caused by defects. To apply the optimized ALD c-TiO2 layer to the PSCs, an efficiency of 18.36% was achieved. It is the top record among the PSCs using a compact TiO2 layer formed by ALD.
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