Abstract
The aim of this study is the optimization of the antireflection effect of SiNx in silicon on glass based structure. A numerical calculation is performed and a SiNx double stack antireflection coating is found to have significant advantages over single-layer due to their broad-range coverage of the solar spectrum. Moreover, it was found that minimum reflection losses is obtained for SiN<sub>x</sub> /SiN<sub>x</sub> double-layer ARC with refractive indexes of 1.9 et 2.3 for the top and the bottom layer, respectively. The effect of the incident angle on reflectance is also studied. The numerical optimization procedure and its results are presented.
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