Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Abstract

This paper presents a systematic approach to transduction optimization of resonant piezo-based MEMS devices. The method is based on inverse design approach using direct piezoelectric effect and exploits mechanical action of desired mode to calculate the polarization map of the piezoelectric ceramics. Optimal transduction is achieved by matching the excited electric field distribution to the inversely retrieved polarization map using the electrode segmentation and topology optimization technique. The proposed method was applied to improve the design of existing state-of-the-art piezoelectric MEMS mirrors. The optimized devices feature 70% increase in the optical scan angle ( $\theta _{\mathrm {opt}}$ ) as well as 47 % reduction in power consumption compared to original design. At the same optical scan angle, the optimized devices required 2.28-fold less driving voltage amplitude. [2020-0342]