Abstract
We investigate the growth of periodically aligned silicon microstructures for the fabricationof square spiral photonic crystals using the glancing angle deposition phi-sweepprocess. We report the optimization of the phi-sweep offset angle for fabrication ofmicrostructures with more precise geometry. The effects of varying the sweep offset angle ofthe phi-sweep process are studied for films deposited onto a square lattice arrayof growth seeds. To represent one growth segment of the phi-sweep process, wefabricate 15 nm silicon thin films using several azimuthal substrate offsets from0° to45° at a vaporincidence angle of 85°. We also deposit silicon square spirals on square lattice arrayswith the phi-sweep method, using various sweep offset angles fromγ = 0° to45°. We find that usingan offset angle of γ = 26.5° optimizes the shadowing geometry, which minimizes anisotropic broadening,producing greater quality photonic crystal structures. From normalincidence reflection spectroscopy, a maximum full width at half-maximum of273 ± 3 nm and a relativepeak width (Δλ/λ) of16.1 ± 0.1% were found for asweep offset angle of γ = 26.5°.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
