Abstract

We consider optimization of parameters of micro/nanooscillators intended for investigation of adsorption-desorption (AD) processes, which are fast in comparison with the response rate of the oscillator itself. We consider the choice of the values of the Q-factor, the resonant frequency of the micro/nano-cantilever and the excitation frequency, in order to ensure that experimentally obtained micro/nanooscillator time response can be used for extraction of information about the AD process parameters. It is shown that a very small cantilever, which has a very high resonant frequency, can be used for investigation of AD processes whose time constant is as short as 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-5</sup> s.

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