Abstract

A new thermal ring-opening polymerization technique for 1, 1, 3, 3-tetra-ph enyl-1, 3-disilacyclobutane (TPDC) based on the use of metal nanoparticles produced by pulsed laser ablation was investigated. This method facilitates the synthesis of polydiphenysilylenemethyle (PDPhSM) thin film, which is difficult to make by conventional methods because of its insolubility and high melting point. TPDC was first evaporated on silicon substrates and then exposed to metal nanoparticles deposition by pulsed laser ablation prior to heat treatment. The TPDC films with metal nanoparticles were heated in an electric furnace in air atmosphere to induce ring-opening polymerization of TPDC. The film thicknesses before and after polymerization were measured by a stylus profilometer. Since the polymerization process competes with re-evaporation of TPDC during the heating, the thickness ratio of the polymer to the monomer was defined as the polymerization efficiency, which depends greatly on the technology conditions. Therefore, a well trained radial base function neural network model was constructed to approach the complex nonlinear relationship. Moreover, a particle swarm algorithm was firstly introduced to search for an optimum technology directly from RBF neural network model. This ensures that the fabrication of thin film with appropriate properties using pulsed laser ablation requires no in-depth understanding of the entire behavior of the technology conditions.

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