Abstract
AbstractElectron probe microanalysis (EPMA) has developed over the past 35 years into a versatile and reliable tool for the quantitative analysis of microregions in solids. Recently its applicability has been extended to the determination of the composition and the thickness of thin layers or multilayers on substrates. Precise and reliable quantifications by EPMA presuppose that the x‐ray intensities are measured under optimized conditions. We discuss some of the important aspects concerning the exact measurement of x‐ray intensities with signal properties. The topics covered range from size of the excitation volume and aspects of the generation, absorption, and emission of x‐rays to instrumental stability, optimization of instrumental parameters, and sources of errors in EPMA.
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