Abstract
Highly conducting, optically transparent and highly bending-durable Ti-doped ZnO thin film (Ti-ZnO) on flexible Willow GlassTM via atomic layer deposition is reported. The influence of the deposited film’s thickness (from 10 to 50 nm) on its microstructures, mechanical flexibility, and electrical and optical properties was investigated systematically. The results showed that the Ti-ZnO films were converted from non-crystalline structures to nanocomposite structures with increasing film thickness. The film having 40 nm thickness with enhanced optical and electrical properties showed the best figure of merit among all the films. The changes in fracture and resistivity of the films, depending on the bending cycles, showed that the films with thicknesses of 30 and 40 nm exhibited superior flexible stability. Thus, 40 nm Ti-ZnO thin film on flexible Willow GlassTM would be the best sample for efficient optical, electrical and bending properties for flexible device applications.
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