Optimization of AZO films for integrating optically transparent antennas with photovoltaics

Abstract

The importance of having an optimal material for fabricating Optically Transparent Antennas (OTAs) is crucial for designing highly efficient antennas that can be integrated with photovoltaics. Transparent Conductor Oxides are promising for OTA fabrication due to their capability of being simultaneously transparent at optical frequencies and conductive within the radio frequency (RF) range. Here in this study, thin aluminum and zinc oxide layers were co-sputtered onto Si and a polycrystalline photovoltaic cell and then annealed between 350 °C and 450 °C for 24 and 48 h in a N2 ambient. The annealing process ensured the formation of Aluminum Zinc Oxide (AZO) with low resistivity ≈10−5 Ω cm and a transparency of 86% between 350 and 750 nm. The material was tested by performing RF characterization and by fabricating and testing two different OTAs. The results of the optimization process and characterization show that the AZO material is feasible for OTA fabrication.