Abstract
Stiffness and flow rate are always used to evaluate the performance of the hydrostatic slides and well-designed parameters, such as flow rate ratio, initial flow rate, pump pressure and oil film thickness, allow the slides achieving nanoscale precision. In this study, the relationship between the design parameters and the stiffness and flow rate is reveal by an analytical model. Then a multi-objective optimization problem is solved using Non-dominated Sorting Genetic Algorithm II. The optimization objectives are maximize stiffness and minimize flow rate. At last, the optimized design parameters are calculated and corresponding maximum stiffness and minimum flow rate of the hydrostatic slides are acquired.
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