Abstract
Optimisation of the Deposition and Annealing Parameters of Paraelectric PLZT (28/0/100) Thin Films Grown by Rf Magnetron Sputtering
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https://doi.org/10.1016/b978-0-444-82312-0.50010-4
Journal: Small Scale Structures | Publication Date: Jan 1, 1996 |
Optimisation of the Deposition and Annealing Parameters of Paraelectric PLZT (28/0/100) Thin Films Grown by Rf Magnetron Sputtering
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