Abstract
The growth of Si-photonics in research and development of the spot size converter (SSC) fabrication become essential as a coupling device inside optical interconnection. SSC between Si-waveguides and single mode fiber (SMF) can be fabricated using a cost-effective mask-transfer method by UV-curable resin. We obtained the SSC optimum shape by finding the loss amount when SSC was connected to the optical wiring from beam propagation method (BPM) simulation. A prototype fabrication of SSC was successfully fabricated with photomask size 3μm aperture diameter. Hence, the potential for future optical interconnection device is approaching.
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