Optimal Design of the Single-Mode Piezoelectric Actuator

Abstract

The general operation of a piezoelectric ultrasonic actuator is to convert the cyclic motion of the piezoelectric plate to a linear motion at the rotor or slider. The conventional piezoelectric ultrasonic actuator has two symmetric exciter electrodes on the front surface and each electrode covers one half of the front surface. The rear surface has only one electrode that severs as a common drain. In this paper, the design and simulation of the novel single-mode piezoelectric actuator with asymmetric electrodes were presented. The accomplishment of this study is to find the optimal dimensions of the piezoelectric plate and the asymmetric electrodes, and the stator tip on the piezoelectric ultrasonic actuator would have the larger vibrating amplitude. From the simulation experiment results, the optimal dimensions of the piezoelectric plate are 20×10×1 mm with 12 mm exciter electrode length, and the vibrating amplitude is from 0.73μm increasing to 0.91μm.