Abstract
Ultrasonic vibration system is the chief component of USM machine tool. Whether products are precisely machined is lie on the performance of the system. To design good performance of ultrasonic vibration system, finite element method is used to analyse the dynamic performance of the system based on theoretic calculation. The dynamic performance of transformer and transformer with tool is analysed respectively, including natural vibration characteristic and harmonic characteristic. The result of FEA is compared with theoretic calculation. The parametric optimization design technique of the finite element analysis package ANSYS is applied to optimize the structure dimension of the piezoelectric transducer and transformer with tool. Then amplitude of the optimized system and the previous system is compared based on laser-CCD sensor for micro-displacement. The optimized system is more superior and has larger amplitude. Last some round holes are machined on kentanium YG8, monocrystalline silicon, PZT. And machining effect of single Micro-USM is got by the test.
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