Abstract
This chapter provides a review of the optically detected magnetic resonance (ODMR) techniques. The principle and methods of a variety of the ODMR technique, namely ODMR by different ways of optical detection, ODMR in zero field or in the presence of an external magnetic field, cw-and time-resolved ODMR, will be described. The ability of the ODMR technique to provide important information on physical properties of defects in semiconductors, such as chemical identification, electronic and geometric structure, related carrier recombination, etc., will he demonstrated. Recent progress, trends and prospects in achieving high spectral, time and spatial resolution of the ODMR techniques will also be outlined.
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