Abstract
Abstract The photoaddressed spatial light modulator (PLSM) with thin hydrogenated amorphous silicon carbide photoreceptor α-Si1−XCx:H and nematic liquid crystal has been fabricated. The films were prepared by rf plasma decomposition of SiH4 and CH4 gas mixture. They have a high dark resistivity and photosensitivity as a hydrogenated amorphous silicon, but a more transmittance in visible spectrum. The maximum of diffraction efficiency for PLSM was achieved for the write light intensity 40 μW/cm2, a resolution on the one half of maximum of diffraction efficiency was 54 mm−1. The optical response of PLSM was observed in the frequency region from 1 Hz to 100 Hz.
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