Abstract
Optical waveguiding layers of LiNbO3 on LiTaO3 substrates were obtained by rf sputtering. The LiNbO3 layer was determined to be a single crystal over the whole deposited legion by reflection electron diffraction patterns. Propagation of TE0 and TM0 modes were observed for an as-sputtered film, and TE0, TEi, TM0 modes for a film annealed at 1100°C for 10 minutes. The layer's effective thickness and refractive index (n0) of 2500 A and 2.318 at 6328 A respectively, were calculated from the coupling conditions. The losses were 16 dB/cm for the as-sputtered film and 8 dB/cm for the annealed film.
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