Abstract
In the working environment, machines without vibrations are non-existent. The abnormal operating conditions of machines can be discerned through characteristic patterns within vibration signals. Therefore, real-time, low-cost vibration sensing is essential for industrial applications to track the status of machines. Herein, we propose an optical vibration sensor that is self-powered, supporting on-demand visual readouts. Without external power, this prototype device can cover a broad frequency range from 50 to 800 Hz, fitting into most industrial machinery scenarios. Through finite element analysis and experimental validation, the device exhibits exceptional performance, with a predicted minimum detectable deformation as low as 0.19 µm. Notably, the device possesses vibration signal storage functionality and adopts near-infrared light to achieve on-demand readout, bringing a novel visual perspective to the fields of vibration sensing and equipment health diagnostics.
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