OPTICAL SWITCH BASED ON MOVING POLYMER WAVEGUIDES AND SELF-LATCHING STRUCTURE

Abstract

International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 447-450 (2003) Optical MEMSNo AccessOPTICAL SWITCH BASED ON MOVING POLYMER WAVEGUIDES AND SELF-LATCHING STRUCTUREH. B. LIU and F. CHOLLETH. B. LIUMicroMachines Centre, School of MPE, NTU, 50 Nanyang Avenue, Singapore Search for more papers by this author and F. CHOLLETMicroMachines Centre, School of MPE, NTU, 50 Nanyang Avenue, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001496Cited by:3 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractThis paper describes a new type of optical switch, named as SWOMS (Self-latching Waveguides Optical MEMS Switch). The SWOMS is based on a novel micromachined bistable self-latching structure, which is fabricated on a SOI (silicon-on-insulator) wafer with a 35μm top silicon layer, and with polymer waveguides attached on it. Comparing to existing moving waveguide switches, SWOMS has some unique promising features such as gap-elimination and self-latching. Here, the structure, principle, and fabrication of SWOMS will be introduced.Keywords:Optical SwitchMEMSWaveguideSelf-LatchingSWOMS References E. Ollier and P. Mottier, Electronics Letters 32(21), (1996). Google Scholar Lin, L.Y.; Goldstein, E.L. MEMS for free-space optical switching, LEOS'99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting, Volume: 2, 1999. Page(s) 483-484 vol.2 . Google Scholar Makihara, M. Microelectromechanical intersecting waveguide optical switch based on thermocapillarity, Optical MEMS, 2000 IEEE/LEOS International Conference on, 2000 Page(s) 33–34 . Google ScholarThor Bakkeet al., IEEE Journal on Selected Topics In Quantum Electronics 8(1), (2002). Google Scholar FiguresReferencesRelatedDetailsCited By 3Of light, of MEMS: Optical MEMS in telecommunications and beyondF. Chollet, H. B. Liu, M. Ashraf, B. Thubthimthong and X. M. Zhang et al.22 October 2009 | Sadhana, Vol. 34, No. 4Layout Controlled One-Step Dry Etch and Release of MEMS Using Deep RIE on SOI WaferL. Haobing and F. Chollet1 Jun 2006 | Journal of Microelectromechanical Systems, Vol. 15, No. 3Layout design rules for one-step dry release and non-stiction wet release of MEMS using DRIE/SOI technology Liu Haobing and F. Chollet Recommended Vol. 04, No. 03 Metrics History KeywordsOptical SwitchMEMSWaveguideSelf-LatchingSWOMSPDF download