A NEW PROCESS FOR FABRICATING CONVEX CORNERS IN SILICON

Abstract

International Journal of Computational Engineering ScienceVol. 04, No. 02, pp. 307-310 (2003) Silicon MicromachiningNo AccessA NEW PROCESS FOR FABRICATING CONVEX CORNERS IN SILICONXIAO LIN ZHANG, JANAK SINGH, AJAY AGARWAL and Q. X. ZHANGXIAO LIN ZHANGInstitute of Microelectronics, Singapore 117684, Singapore Search for more papers by this author , JANAK SINGHInstitute of Microelectronics, Singapore 117684, Singapore Search for more papers by this author , AJAY AGARWALInstitute of Microelectronics, Singapore 117684, Singapore Search for more papers by this author and Q. X. ZHANGInstitute of Microelectronics, Singapore 117684, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001149Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractThis paper presents an innovative process scheme to fabricate convex corner in silicon for bulk micro-machined micro-mirror. This method combines deep reactive ion etching (DRIE) with anisotropy wet KOH etching process, with corner compensation structures. Using this method, proper mechanical structure, including about 650μm deep silicon recess with flat, silicon — residue free bottom, V-grooves, and U-grooves are realised simultaneously in single wafer. References Chad B. O'Neal et al., "Challenge in Packaging of MEMS" IEEE 1999 Proceedings International Symposium on Advanced Packaging Materials. Processes, Properties and Interfaces . Google Scholar Kato Y., Mori K., Mase T., Takahashi A., Imaki O., Kaku R., "Development of 4 × 4 MEMS optical switch" Optical MEMS, 2000 IEEE/LEOS International Conference Page(s): 95-96 . Google Scholar L. S. Huang, et al., "MEMS packaging for micro mirror switch", in Proc. 48th IEEE Electron. Components Technol. Conf., Seattle WA, 25-28, 1998 . Google Scholar P. Helin, M. Mita, H. Fujita, "Self-aligned vertical mirror and V-grooves: Appilied to a self-latching matrix switch for optical networks", Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems 2000 . Google Scholar Ki-Chang Song et al., "Micromachined Silicon Optical Bench for the Low Cost Optical Module", Technical Report, LG Electronics Institute of Technology . Google ScholarBen Kloecket al., IEEE Transactions on Electron Devices 36(4), (1989). Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 02 Metrics History PDF download