Abstract
The results of study of ion-cleaned and -implanted surfaces of polycrystalline Be, Al, Ti, Fe, Cu, Mo, Zr, and W using optical and infrared (IR) spectroscopy are presented. It is shown that major changes in the optical reflectance spectra are observed in the range of 190–250 nm and are associated with both the formation of scattering centers and features of the chemical state of near-surface layers of materials. It is established using IR spectroscopy that treatment by Ar+ ion beam with a broad energy spectrum increases the reflection coefficient of the modified surface and additional resonance lines related to the formation of oxides themselves and hydroxyl groups are revealed in the reflectance spectrum in the case of formation of oxide film on the surface.
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