Abstract
CrO/ZrO optical superlattices composed of ten film stacks with ∼9 nm thickness in each stack are obtained in a duel-gun rf magnetic sputtering system. By controlling the thickness percentage of ZrO in a CrO/ZrO stack and the flow-rate ratio of O 2/Ar, the optical requirements for optical superlattices being used as APSM blanks can be met. The dielectric constants of CrO/ZrO optical superlattices are shown to fit the effective medium approximation, and the calculated transmittance, reflectance and total film thickness of CrO/ZrO optical superlattices may thus serve as π-phase shifters.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
