Abstract
Lithium Niobate (LiNbO3) can be applied as a thin film coating because it has superior piezoelectric, optoelectronic, pyroelectric, and photorefractive properties. The growth of LiNbO3 thin film using Chemical Solution Deposition (CSD) method with spin coating technique speed of 8000 rpm for 30 seconds on a p-type silicon substrate (100) with variations in concentration of RuO2 container (0%, 2%, 4%, 6%) and annealing temperature (750 °C, 800 °C, 850 °C). The annealing temperature is kept on hold for 8 hours with an increase of 1.67 °C/minute. The result of LiNbO3 bandgap energy film is 2.55 eV to 3.18 eV with a refractive index ranging from 1.15 to 1.65.
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