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Abstract
CeO 2–SiO 2 composite thin films were prepared by e-beam evaporation and ion beam-assisted deposition (IBAD) using an End-Hall ion source. The refractive index of composite thin films exhibited a maximum value at 20–35% SiO 2 fraction, indicating the highest packing density. Optical analysis revealed that the transmittance and reflectance spectra of composite films were consistent with the results of the refractive index. The results from X-ray diffractometry (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements showed that composite thin films containing 20–35% SiO 2 concentration had a dense and smooth amorphous surface, compared to the roughened granular structure of the pure SiO 2 and CeO 2 thin films.
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