Optical observations of post-discharge phenomena of laser-triggered discharge produced plasma for EUV lithography

Abstract

This paper reports the dynamic post-discharge phenomena of laser-triggered discharge-produced plasmas (LTDPP) for extreme ultraviolet lithography (EUVL) sources. A pulsed laser was focused on the high-voltage tin cathode surface to form tin vapor jet across a 5 mm long anode–cathode gap, which leads to the electrical breakdown. The post-discharge phenomena were observed using both of the Schlieren method and high-speed camera. Schlieren images show the dynamic evolution of the discharge plasma and the development of tin droplets. Visible emission from the plasma lasted for more than 1 µs after the current stopped. The droplets emerged from the cathode approximately 100 µs after discharge and spread throughout the electrodes gap. Various sizes of droplets stagnate in the gap for milliseconds. The subsequent laser pulse and voltage application show an interaction between the droplets and the subsequent discharge. The subsequent laser pulse evaporates not only the cathode surface but also the droplets, which influence the tin vapor distribution in the gap. This uncertain vapor distribution affects the formation process of microplasmas that emit EUV.