Abstract
The electronic and vibrational properties of hydrogenated amorphous carbon (a-C:H) films deposited by a dual electron cyclotron resonance-radio frequency (ECR-RF) plasma technique from methane at different negative RF substrate bias voltages have been investigated by several complementary optical methods covering a wide spectral range (0.06 to 30 eV). The results as a whole are interpreted in terms of local C/C and C/H bonding configurations and their effects on the electronic states introduced by the π-bonded clusters.
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