Abstract
A 1:1 lithography projection has been designed and is fabricated for a 3D integrated circuit fabrication platform. Using a dual triplet as an initial type to form a one-to-one lens and applying a tele-centric structure, the optical common components of an optical system have been designed. The tolerance of the mechanical mounts is simulated by tilting the mounts to single and two aspheric surfaces of lens to show the degradation in the modulation transfer function; thus, the single aspheric-tilted mount in a system is suggested to reach the precision. Furthermore, Koehler illumination is used. By applying partial coherence analysis, the optimized relative numerical aperture was found. As the system is built, optimized performance should be expected.
Published Version
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