Abstract
Composite films of titanium and vanadium oxides (TVO) with various compositional ratios were prepared by sputtering deposition. The optical properties, crystalline structure and film morphology were investigated as a function of the composition. The results of thermochromism and X-ray diffraction suggest that the TVO films at any compositional ratios form substitutional solid solution of Ti and V, that is, Ti x V 1− x O 2, where 0 ≤ x ≤ 1. Dielectric constants of the TVO films at any compositions were consistently determined at photon energies between 0.75 to 3 eV by employing the Lorentz-oscillator formula. With wide variation in x, the dielectric constants at visible and near-infrared wavelengths monotonically decrease down to the values of TiO 2, which suggests that dielectric constants of the TVO film can be precisely controlled by adjusting rf power in co-sputtering deposition.
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